Identification and Analysis of Factors Affecting Air Flow Optimization and Particle Dispersion in Clean Rooms of Electronic Industry Publisher



Nodoushan M J ; Jafari A ; Jafarizaveh M ; Golbabaei F
Source: Journal of Air Pollution and Health Published:2026

Abstract

Clean rooms play an important role in electronics industries, specifically for precision manufacturing by strictly regulating pollution control, contaminants, and pressure. Airflow design and particle behavior are key determinants of contamination control performance in clean rooms. Despite technological advances, suboptimal air distribution remains a major contributor to particle dispersion and energy inefficiency. The review systematically examines experimental and modeling studies on airflow management and clean room performance improvement and their real-world application. A search was conducted in Scopus, PubMed, and Web of Science using keywords related to clean rooms, air pollution, and airflow. Following Preferred Reporting Items for Systematic reviews and Meta-Analyses (PRISMA) guidelines, studies published from 2000 up to November 2025 were screened, and 25 studies were selected. To improve air flow and pollution control, various factors were identified along with their strategies and results. The factors identified were classified into four major classifications and their strategies and results were analyzed. These classifications included architectural and structural factors (e.g., room length, floor height), ventilation and air flow factors (e.g., velocity, air change rate, fan-filter-unit configuration), environmental and operational factors (e.g., activity of personnel, SCARA robot, season), and pollutant characteristics (e.g., particle size, and density). Current evidence indicates that performance improvement of clean rooms requires integrating these factors into a multi-objective framework balancing cleanliness, energy demand, and process stability. We propose a framework connecting different parameters to measurable cleanliness and energy efficiency indices. Copyright © 2026 Tehran University of Medical Sciences.